A, the equipment use:
Equipment used in electronics, ceramics, chemical and other industries products in a vacuum and inert gas and reducing gas protection under the condition of high temperature firing.
Second, the equipment technical parameters:
2.1 furnace size: 300 x 260 mm x H (D).
Furnace features: 2.2:1300 x 1300 x 2000 mm (L * W * H).
2.3 heating mode: high performance more strands woven molybdenum wire evenly arranged in surround furnace type uniform heating.
2.4 heating elements: high performance more strands woven molybdenum wire.
2.5 the highest temperature: 1500 ℃.
2.6 working temperature: long-term use of temperature: 1350 ~ 1450 ℃.
Temperature control precision: 2.7 + / - 3 ℃ (will be subject to the instrument shows).
2.8 number of sets of temperature control: 1 set of temperature control.
Heating power: 2.9 kw.
Temperature measurement method: 2.10 S dividing platinum-rhodium thermocouple continuous real-time temperature measurement.
2.11 method of temperature control: phase shift voltage regulator, voltage regulator intelligent digital display temperature control instrument automatic temperature control, furnace temperature at room temperature to 1450 ℃ continuous stepless adjustable.
Ultimate vacuum: 2.12 2 x 103 pa.
2.13 extraction rate: 30 minutes to use vacuum degree.
Three, equipment structure and composition:
Equipment is mainly composed of furnace lining, vacuum furnace shell, furnace bottom bench work, lift car, lift table driven device, vacuum system, into the exhaust system, water cooling system and electric control system, etc.
3.1 lining: the furnace lining adopts a variety of material composite masonry structure.
3.2 vacuum furnace shell, furnace shell adopts vacuum package structure, furnace shell cylindrical structure is used in the main cylinder, top cover adopts oval vacuum head structure, which adopts vacuum furnace bottom head.
Bench: 3.3 furnace bottom furnace bottom frame is made of steel and steel plate welding and become, peripheral set have installed cover plate. The top of the furnace bottom platform installation vacuum furnace, furnace bottom frame the lower part of the installation of lifting mechanism, transformers, vacuum pump, electric control system, etc., keep the equipment structure of electromechanical integration.
3.4 platform: the equipment adopts outer loading way at the bottom of the furnace, platform as a product of loading and unloading platform and seal at the bottom of the organization.
3.5 platform drive: lift table drive device driven by electric screw nut structure, lead screw nut pair, driven by a motor through the guidepost, drive the lifting arm up and down.
3.6 vacuum system: by the vacuum pump, vacuum pressure gauge, electric contact of vacuum gauge, vacuum valves and vacuum line.
3.7 inlet and exhaust system, air inlet pipe way is set branch, hydrogen and nitrogen branch nitrogen branch set flowmeter, hydrogen branch set up small scale flow meter in a wide range, making it easy for users to process flow regulation of atmosphere.
3.8 electric control system
Electrical control part is composed of electric control parts, temperature control, etc.
3.8.1 electric control part
Electric control part mainly is to control the exhaust system, water cooling system, vacuum system, the workbench of the lifting mechanism and condition monitoring, abnormal alarm, etc.
3.8.2 temperature control part
Temperature control part includes temperature control table, SCR, air switch, contactor, etc.