A, the equipment use:
Mainly used for reaction sintered silicon carbide products quality.
Second, the product process description:
Products under N2 gas protective atmosphere through preheating zone, high temperature, cooling zone, complete product firing.
Three special requirements, the structure of the equipment:
Four, the structure of the equipment:
4.1 furnace body parts
4.4.1 effective furnace size: 13200 x ф 300 mm x D (L).
4.1.2 elevation 1000 mm (the furnace center and the ground plane distance shall prevail).
4.1.3 the highest use temperature: 2300 ℃, the highest temperature is less than 12 hours at room temperature.
4.1.4 high temperature control precision: plus or minus 30 ℃ (instrument display and the difference between the actual temperature of the chamber of a stove or furnace temperature). The preheating zone 5 ℃ temperature control precision (instrument display and the difference between the actual temperature of the chamber of a stove or furnace temperature).
4.1.5 ultimate vacuum pa 6.7 x 10 to 1.
4.1.5 furnace structure
Full furnace temperature range of a total of four, the top three zones for preheating zone, a fourth temperature zone for high temperature. Temperature range of 1 1500 mm in length, design temperature 400 ℃. 2 temperature zone length is 1200 mm, the design temperature of 700 ℃. 3 temperature zone length is 1650 mm, the design temperature of 1000 ℃. 4 temperature zone length is 1850 mm, the design temperature of 2300 ℃. Slow cooling segment length is 2350 mm, the length of the fast cooling, 2300 transitional feeding length is 2350 mm.
Temperature range of 1, 2, 3, furnace tube wall thickness of 10 mm high temperature resistant stainless steel seamless tube (Cr25Ni20Si2 material), about 200 mm, with thermal insulation layer with sealing of the exhaust air outlet and shut off the oven door imported seal device. Chamber of a stove or furnace refractory insulation level 1 were used respectively to high alumina, mullite light brick, aluminum silicate fiber board, high-quality materials such as silicon calcium tablets bricks; With high temperature range of (4) cohesion furnace brick choose alumina hollow ball products. Heating mode is made of high quality such as high performance silicon carbon rod diameter and heating, heating elements, such as spacing distribution, ensure uniform heating.
4 zones for high temperature, furnace using high purity graphite electrode tube, furnace pipe heat preservation and heat insulation outside using shape composite carbon fiber felt, peripheral and glass wool insulation layer with mica paper packages, in copper tube bending into the induction coil of copper pipe outside surface coating with high temperature resistant insulating layer, further ensure insulation. Coil through high temperature insulation porcelain and heat-resistant stainless steel frame supported fixed, stainless steel frame by the adjustable stainless steel screw connected to the furnace shell is fixed.
Slow cooling furnace tube using with high specifications of the graphite tube, both ends with carbon brick is fixed on the double water-cooled furnace shell. Graphite tube and leave appropriate gap between water-cooled furnace shell, the indirect heat transfer, slowly lower the temperature, prevent cooling too urgent affect product performance.
Fast cooling section without thermal insulation material, the use of double water jacket structure. Inner cooling jacket is furnace tube, out by the slow cooling of the product directly contact with cooling jacket, increases the temperature and cooling effect.
4.1.6 furnace
Furnace body structure with subsection, the shell is made of high quality steel, steel plate welded together. Furnace adopts bolt connection between paragraphs, joint use rubber asbestos board and high-temperature sealant to seal. paragraphs